Advanced Film Architectures – Multilayers, Nanolayers & Nano-Composites
Mustang Vacuum Systems (MVS) has significant experience in the development and manufacture of industrial scale PVD deposition chambers for next generation tribological film systems to enable thick multi-layer, fine nano-layer or nano-composite structuring.
REF: N.Randall, CSM Instruments Donohue et al (1995) Lu et al (2005)
MVS has strategically developed a flexible process capability to deposit a range of thick (individual layers typically µm ordered) multilayer coatings using sputter, HIPIMS or steered arc evaporation techniques for a wide range of demanding applications including erosion / abrasion resistance and enhanced high speed milling and cutting. Examples include Metal / Metal Nitride architectures achieved by controlled switching of appropriate reactive gas flows during deposition or Metal 1 Nitride / Metal 2 Nitride and hard coat + low friction top coat architectures achieved by sequential switching of appropriate deposition sources to be utilized.
More recently through accurate control of deposition rate from dissimilar source materials, precise control of substrate rotation frequency and an understanding of source material reactivity behavior during reactive sputtering and evaporation, MVS has additionally developed the ability to co-deposit a range of fine, nano-layered (typical repeat period 2-10nm) structured films, at industrial scale and without productivity loss when compared to conventional processes. These films can exhibit tailored and significantly improved mechanical (hardness, toughness etc), thermal and tribological properties over conventional monolithic structured films.
MVS tribological systems may also be configured to provide, via reactive deposition of conventional transition metal based ceramic hard materials whilst co-depositing with appropriate covalent nitride species such as Si3N4or BN, the capability to manufacture nano-composite structured hard coatings. |
